Standoff and Miniature Chemical Vapor Detectors Based on Tunable Diode Laser Absorption Spectroscopy
Standoff and Miniature Chemical Vapor Detectors Based on Tunable Diode Laser Absorption Spectroscopy
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DOI：
10.1109/jsen.2009.2038536
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发表时间：
2010-03-01
影响因子：
4.3
通讯作者：
Allen, Mark G.
中科院分区：
文献类型：
--
作者：
Frish, Michael B.;Wainner, Richard T.;Allen, Mark G.
通过可调谐二极管激光吸收光谱（TDLAS）进行痕量气体传感和分析已成为工业过程监测和控制、质量保证、环境传感、工厂安全和基础设施安全所接受的稳健可靠的技术。传感器采用封装良好的波长稳定的近红外（1.2-2.0 μ m）激光源，可检测十几种有毒或工业重要气体。近年来发展起来的中红外激光器，特别是波长范围为3-12 μ m的量子级联器件，可以实时检测许多碳氢化合物的百万分之几浓度。例如，在一个实施例中，天然气管道泄漏。采用10 mW的DFB激光器，眼睛安全，电池供电，6磅手持远程甲烷泄漏探测器照亮非合作的地形表面，并分析返回的散射光，以推断过量甲烷的存在。对于航空测量，用大口径望远镜取代手持收发器，并在激光发射器上增加掺铒光纤放大器，将间隔距离扩展到3000米。通过选择具有适当波长的激光源，对峙TDLAS工具检测痕量浓度的非甲烷有害气体，包括几个高优先级的有毒工业化合物和排放物从非法化学生产laborators.This本文还介绍了微型集成光学TDLAS传感器的概念，联合收割机结合激光源，采样部分，和检测器上的单片半导体材料系统基板。这样的芯片级低功率集成光学气相化学传感器可以实现低成本的大规模生产，使得数百或数千个这样的传感器可以成本有效地分布在广泛的感兴趣区域上并经由无线网络进行通信。
Trace gas sensing and analysis by tunable diode laser absorption spectroscopy (TDLAS) has become a robust and reliable technology accepted for industrial process monitoring and control, quality assurance, environmental sensing, plant safety, and infrastructure security. Sensors incorporating well-packaged wavelength-stabilized near-IR (1.2-2.0 mu m) laser sources sense over a dozen toxic or industrially-important gases. Recently developed mid-IR lasers, particularly quantum cascade devices spanning wavelengths of 3-12 mu m, can sense in real-time sub-parts per million concentrations of many hydrocarbons.A large emerging application for TDLAS is standoff sensing of chemical vapors, e. g., leaks from natural gas pipelines. Employing a 10-mW DFB laser, the eye-safe, battery-powered, 6-lb handheld remote methane leak detector illuminates a noncooperative topographic surface and analyzes returned scattered light to deduce the presence of excess methane. For aerial surveying, replacing the handheld transceiver with a large-aperture telescope and adding an erbium-doped fiber amplifier to the laser transmitter extends the standoff distance to 3000 m. By selecting a laser source having an appropriate wavelength, the standoff TDLAS tool detects trace concentrations of nonmethane hazardous gases, including several high-priority toxic industrial compounds and emissions from illicit chemical production laboratories.This paper also describes concepts for miniature integrated optic TDLAS sensors that combine a laser source, sampling section, and detector on a monolithic semiconductor materials system substrate. Such chip-scale low-power integrated optic gas-phase chemical sensors may enable low-cost mass production, so that many hundreds or thousands of such sensors can be distributed cost-effectively over a wide area of interest and communicate via wireless networks.