Transmission electron microscopy 'windows' for nanofabricated structures
Transmission electron microscopy 'windows' for nanofabricated structures
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DOI：
10.1088/0957-4484/15/9/012
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发表时间：
2004-09-01
期刊：
影响因子：
3.5
通讯作者：
Kasemo, B
中科院分区：
文献类型：
--
作者：
Grant, AW;Hu, QH;Kasemo, B
我们展示了用于透射电子显微镜（TEM）的氮化硅膜支撑（“窗口”）的微加工，并说明了它们在直接制备和研究纳米结构中的有用性。这些膜“窗口”使 TEM 能够作为一种经济实惠的诊断工具，以迭代的方式纳入纳米结构制造及其应用中，无论是在制备过程中还是之后，以及纳米结构的后续实验步骤，甚至可以用于实时原位 TEM 观察。展示了几个例子，包括用于多相催化应用的蛋白质吸附和纳米加工。
We present the microfabrication of silicon nitride membrane supports ('windows') for transmission electron microscopy (TEM) and illustrate their usefulness for direct preparation and studies of nanostructures. These membrane 'windows' enable TEM to be incorporated as an affordable diagnostic tool in nanostructure fabrication and applications thereof, in an iterative fashion, both during and after preparation as well as subsequent experimental steps with the nanostructures, and even for real time in situ TEM observations. Several examples are shown, including protein adsorption and nanofabrication for applications in heterogeneous catalysis.