Improvement of high entropy alloy nitride coatings (AlCrNbSiTiMo)N on mechanical and high temperature tribological properties by tuning substrate bias
Improvement of high entropy alloy nitride coatings (AlCrNbSiTiMo)N on mechanical and high temperature tribological properties by tuning substrate bias
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DOI：
10.1016/j.surfcoat.2020.126247
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发表时间：
2020-11-15
影响因子：
5.4
通讯作者：
Duh, Jenq-Gong
中科院分区：
文献类型：
--
作者：
Lo, Wei-Li;Hsu, Sheng-Yu;Duh, Jenq-Gong
高熵合金氮化物涂层具有上级机械强度、高抗氧化性和热稳定性等优点，常用于防护性硬质涂层领域。然而，新型HEA氮化物薄膜的高温摩擦学领域尚未得到很好的研究。本研究采用射频磁控溅射技术，在Inconel-718和Si（100）基片上制备了（AlCrNbSiTiMo）N薄膜，并在300 ℃的沉积温度下调节两种基片的偏压。在700 ℃的磨损试验中，在-100 V电压下沉积的（AlCrNbSiTiMo）N薄膜的最低磨损率约为1.2 x 10（-6）mm（3）N（-1）m（-1）。钼掺杂后，高温磨损过程中在表面上观察到MoO 3 Magneli相，高温摩擦系数显著降低。涂层在700 ℃的磨损试验中表现出0.48的平均摩擦系数值。研究了高温摩擦学性能与膜层力学性能、塑性变形抗力H-3/E-2和过量残余应力的关系，为设计适用于严重磨损条件的硬质涂层提供了新的思路。通过调节衬底偏压，（AlCrNbSiTiMo）N涂层具有优异的力学性能和摩擦学性能，有望成为高温摩擦学保护膜。
High entropy alloy nitride coatings (HEAN), showing superior mechanical strength, high oxidation resistance, and thermal stability, have often been used in protective hard coatings field. However, the high temperature tribological field of novel HEA nitride films has not yet been well studied. The correlations among tribological properties, compressive residual stress, mechanical properties, and self-lubricating oxide are still limited.In this research, the novel (AlCrNbSiTiMo)N coatings were fabricated on both Inconel-718 and Si (100) substrate by radio frequency (RF) magnetron sputtering via tuning both substrate bias at 300 degrees C deposition temperature. The (AlCrNbSiTiMo)N coatings with a specific substrate bias exhibit an outstanding hardness of 34.5 +/- 0.8 GPa.In the wear test at 700 degrees C, the films deposited at -100 V revealed the lowest wear rate around 1.2 x 10(-6) mm(3)N(-1) m(-1). With Molybdenum doping, the MoO3 Magneli phase was observed on the surface at elevated temperature wearing process, and the friction coefficient at high temperature decreased significantly due to a lubricating surface. The coating exhibited the average friction coefficient value of 0.48 in the wear test of 700 degrees C. The high temperature tribological performance was addressed and related to the mechanical properties, the plastic deformation resistance H-3/E-2, and the excess residual stress of the films.This study provides a new design for hard coatings applied to severe wearing conditions. By tuning substrate bias, the (AlCrNbSiTiMo)N coatings exhibit outstanding mechanical and tribological characteristics, which will be a promising candidate for high temperature tribological protective film.