Microscale Wear Properties of Ultrathin Diamond-Like Carbon Films
Microscale Wear Properties of Ultrathin Diamond-Like Carbon Films
复制标题
超薄类金刚石碳膜的微尺度磨损性能
DOI：
10.1143/jjap.39.l626
复制
发表时间：
2000
影响因子：
1.5
通讯作者：
K. Baba
中科院分区：
文献类型：
--
作者：
K. Shimura;K. Baba
使用原子力显微镜研究了通过射频等离子体增强化学气相沉积生长的超薄类金刚石碳 (DLC) 薄膜的微尺度磨损特性。结果表明，薄膜表面存在一层含有较大sp2成分的低耐磨层。层的厚度取决于沉积期间的自偏压。研究发现，DLC 与基材界面处碳原子和硅原子的混合会影响超薄 DLC 薄膜的表面耐磨性。
Microscale wear properties of ultrathin diamond-like carbon (DLC) films grown by rf plasma-enhanced chemical vapor deposition were investigated using an atomic force microscope. It was revealed that a low wear-resistant layer, which contained a larger sp2 component, existed on the surface of the films. The thickness of the layer depended on the self-bias voltage during deposition. The intermixing of carbon and silicon atoms at the interface between the DLC and the substrate was found to affect the surface wear resistance of ultrathin DLC films.