X-ray reflectivity of multilayers with non-continuous interfaces
X-ray reflectivity of multilayers with non-continuous interfaces
复制标题
具有非连续界面的多层膜的 X 射线反射率
DOI：
10.1088/0953-8984/14/21/305
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
V. Valvoda
中科院分区：
文献类型：
--
作者：
D. Rafaja;H. Fuess,;D. Šimek;J. Kub;J. Zweck;J. Vacínová;V. Valvoda
X射线镜面反射率和漫散射计算使用传统的多层膜模型，假设连续的，不相交的接口，能够拟合的实验数据与非连续界面的多层膜。然而，错误的细化电子密度和界面粗糙度是一个不适当的结构模型的后果。本文提出了一种改进的Parratt光学公式，并结合扭曲波玻恩近似的应用，用于计算具有非连续界面的多层膜中的小角X射线散射。多层不连续性对小角X射线散射的影响的特征在于各个界面的修改的菲涅耳反射和透射系数以及各个层中光路的变化。Fe/Au多层膜的理论方法。通过与透射电子显微镜的结果进行比较，从小角X射线散射得到的结构模型的参数进行了验证。
X-ray specular reflectivity and diffuse scattering calculated using the traditional multilayer model, which assumes continuous, non-intersecting interfaces, are capable of fitting the experimental data obtained on multilayers with non-continuous interfaces. However, wrong refined electron densities and interface roughness are the consequence of an inappropriate structure model. A modification of the Parratt optical formalism combined with the application of the distorted-wave Born approximation was suggested for evaluation of the small-angle x-ray scattering in multilayers with non-continuous interfaces. The influence of the multilayer discontinuity on the small-angle x-ray scattering is characterized by modified Fresnel reflection and transmission coefficients of individual interfaces and by changes in the optical paths in individual layers. The suggested theoretical approach is illustrated on Fe/Au multilayers. Parameters of the structure model obtained from the small-angle x-ray scattering were verified by comparison with results of transmission electron microscopy.