A flexible polymer tactile sensor: Fabrication and modular expandability for large area deployment
A flexible polymer tactile sensor: Fabrication and modular expandability for large area deployment
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DOI：
10.1109/jmems.2006.886021
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发表时间：
2006-12-01
影响因子：
2.7
通讯作者：
Yoon, Euisik
中科院分区：
文献类型：
--
作者：
Lee, Hyung-Kew;Chang, Sun-Il;Yoon, Euisik
在本文中，我们提出并证明了一个模块化的可扩展的电容式触觉传感器，使用聚二甲基硅氧烷（PDMS）弹性体。传感器模块由16 x 16个触觉单元组成，空间分辨率为1 mm，类似于人类皮肤，以及用于扩展的互连线。该传感器已制作通过使用五个PDMS层结合在一起。为了定制传感器的灵敏度，我们通过旋涂浇铸PDMS，并在高度平面化的平台上固化以获得均匀的厚度。电池尺寸为600 × 600 μ m（2），每个电池的初始电容约为180 fF。已经使用具有ImN分辨率的商用测力计和具有IOOnm分辨率的电动z轴精密台测量了细胞的触觉响应。所制造的电池在40 mN（250 kPa）的满量程范围内显示出3%/mN的灵敏度。四个触觉模块已成功地连接使用各向异性导电膏，以证明所提出的传感器的可扩展性。单个传感器模块以及扩展的32 x 32阵列传感器已成功捕获各种触觉图像。
In this paper, we propose and demonstrate a modular expandable capacitive tactile sensor using polydimethylsiloxsane (PDMS) elastomer. A sensor module consists of 16 x 16 tactile cells with 1 mm spatial resolution, similar to that of human skin, and interconnection lines for expandability. The sensor has been fabricated by using five PDMS layers bonded together. In order to customize the sensitivity of a sensor, we cast PDMS by spin coating and cured it on a highly planarized stage for uniform thickness. The cell size is 600 x 600 mu m(2) and initial capacitance of each cell is about 180 fF. Tactile response of a cell has been measured using a commercial force gauge having 1 mN resolution and a motorized z-axis precision stage with 100 nm resolution. The fabricated cell shows a sensitivity of 3%/mN within the full scale range of 40 mN (250 kPa). Four tactile modules have been successfully attached by using anisotropic conductive paste to demonstrate expandability of the proposed sensors. Various tactile images have been successfully captured by single sensor module as well as the expanded 32 x 32 array sensors.