Characterization of Lithium Niobate Thin Films Derived from Aqueous Solution
Characterization of Lithium Niobate Thin Films Derived from Aqueous Solution
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水溶液衍生的铌酸锂薄膜的表征
DOI：
10.1111/j.1151-2916.1998.tb02544.x
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发表时间：
2005
影响因子：
3.9
通讯作者：
S. Hirano
中科院分区：
文献类型：
--
作者：
S. Ono;O. Böse;W. Unger;Y. Takeichi;S. Hirano
通过结晶和光学性质对由水性前体溶液制备的铌酸锂(LiNbO 3 ，LN)薄膜进行了表征，即表面层上的羟基含量。在350°C或500°C热处理后，结晶薄膜表面层上约98%的羟基残基聚合，而在200°C热处理的非晶薄膜表面层上，50%的羟基残基仍保留。高度优选的取向LN膜在成核和结晶期间倾向于由60°的面内旋转组成。蓝宝石 (001) 衬底上的 LN 薄膜（厚度为 670 nm）在 500°C 温度下在氧气中退火后由中和的前体溶液制备，其 TE 0 模式中的光学损耗（632.8 nm 处）为 2 dB/cm，TM 0 模式中的光学损耗为 4 dB/cm（其中 TE 和 TM 分别是横向电模式和磁模式）。
Lithium niobate (LiNbO 3 , LN) films prepared from aqueous precursor solutions were characterized, in terms of the hydroxyl contents on the surface layers through crystallization and optical properties. Approximately 98% of the hydroxyl residues on the surface layers of crystalline films were polymerized after heat treatment at 350° or 500°C, whereas 50% of the hydroxyl residues remained on the surface layers of amorphous films heat-treated at 200°C. Highly preferred oriented LN films had a tendency to consist of in-plane rotation by 60° during nucleation and crystallization. Optical losses (at 632.8 nm) were 2 dB/cm in the TE 0 mode and 4 dB/cm in the TM 0 mode of the LN films (thickness of 670 nm) on sapphire (001) substrates prepared from a neutralized precursor solution after annealing in oxygen at a temperature of 500°C (where TE and TM are the transverse electric and magnetic modes, respectively).