Laser-induced layers peeling of sputtering coatings at 1064 nm wavelength.

Laser-induced layers peeling of sputtering coatings at 1064 nm wavelength.
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1064 nm 波长下溅射涂层的激光诱导层剥离

DOI:
10.1038/s41598-020-80304-2
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发表时间:
2021-02-12
期刊:
影响因子:
4.6
通讯作者:
Shao J
Shao J
中科院分区:
综合性期刊3区
文献类型:
--
作者:
Guo K;Wang Y;Chen R;Zhang Y;Sytchkova A;Zhu M;Yi K;He H;Shao J

文献摘要

相似文献

发现了双离子束溅射涂层在激光辐照后出现的大规模剥层现象,并建立了模型对其进行解释。激光损伤形貌与激光注量有关,在低能量下表现为热力耦合破坏,在高能量下表现为涂层分离。激光与涂层的相互作用中出现了高压梯度,导致了大范围的分层。提出了一个包含缺陷诱导损伤过程和电离空气波损伤过程的两步激光损伤模型来解释不同能量下的这两种现象。在相对较高的能量下(高于20J/cm2),可以启动空气的电离,导致剥离效应。剥离效应与涂层材料的热机械性能有关。
Large-scale layers peeling after the laser irradiation of dual ion beam sputtering coatings is discovered and a model is established to explain it. The laser damage morphologies relate to the laser fluence, showing thermomechanical coupling failure at low energy and coating layers separation at high energy. High-pressure gradients appear in the interaction between laser and coatings, resulting in large-scale layer separation. A two-step laser damage model including defect-induced damage process and ionized air wave damage process is proposed to explain the two phenomena at different energy. At relatively high energies (higher than 20 J/cm2), ionization of the air can be initiated, leading to a peeling off effect. The peeling effect is related to the thermomechanical properties of the coating materials.