Planar capacitive sensors - designs and applications
Planar capacitive sensors - designs and applications
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DOI：
10.1108/02602281011010772
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发表时间：
2010-01-01
期刊：
影响因子：
1.6
通讯作者：
Yang, Wuqiang
中科院分区：
文献类型：
--
作者：
Hu, Xiaohui;Yang, Wuqiang
目的本文的目的是介绍平面电容传感器的传感机理，设计问题，性能评价和应用。在介电材料测试（MUT）的表征和成像的背景下，传感器建模，功能和设计问题的系统研究是必要的。此外，灵敏度分布的影响因素，以及电导率对传感器性能的影响需要进一步研究平面电容传感器。设计/方法/途径虽然分析方法可以提供精确的解决方案，简单的几何形状的传感器，数值建模是首选，以获得传感器响应不同的设计参数和MUT的属性，并导出各种电极设计的灵敏度分布。几个重要的参数已被用来评估在不同的传感模式的传感器的响应。不同的平面电容传感器阵列的设计和实验evaluated.Findings-响应功能和平面电容传感器在不同的传感模式的设计准则已被总结，显示在传输模式或单电极模式的传感器是适合于材料表征和成像，而在分流模式的传感器是适合于接近/位移测量。传感器的灵敏度分布很大程度上取决于电极的几何形状。电导率导致传感器在传输和单电极模式下发生正变化，但导致传感器在分流模式下发生负变化。实验结果证实，感测深度的传感器阵列和埋地导体对电容测量的影响是一致的simulation.Research限制/影响实验验证时，需要一个传感器designed.Originality/value-本文提供了一个全面的研究平面电容传感器的传感器设计，评估和应用。
Purpose The purpose of this paper is to present the sensing mechanism, design issues, performance evaluation and applications for planar capacitive sensors. In the context of characterisation and imaging of a dielectric material under test (MUT), a systematic study of sensor modelling, features and design issues is needed. In addition, the influencing factors on sensitivity distribution, and the effect of conductivity on sensor performance need to be further studied for planar capacitive sensors.Design/methodology/approach While analytical methods can provide accurate solutions to sensors of simple geometries, numerical modelling is preferred to obtain sensor response to different design parameters and properties of MUT, and to derive the sensitivity distributions of various electrode designs. Several important parameters have been used to evaluate the response of the sensors in different sensing modes. The designs of different planar capacitive sensor arrays are presented and experimentally evaluated.Findings The response features and design guidelines for planar capacitive sensors in different sensing modes have been summarised, showing that the sensor in the transmission mode or the single-electrode mode is suitable for material characterisation and imaging, while the sensor in the shunt mode is suitable for proximity/displacement measurement. The sensitivity distribution of the sensor depends largely on the geometry of the electrodes. Conductivity causes positive changes for the sensor in the transmission and single-electrode mode, but negative changes for the sensor in the shunt mode. Experimental results confirm that sensing depths of the sensor arrays and the influence of buried conductor on capacitance measurements are in agreement with simulations.Research limitations/implications Experimental verification is needed when a sensor is designed.Originality/value This paper provides a comprehensive study for planar capacitive sensors in terms of sensor design, evaluation and applications.