Flexible Carbon Nanotube Sensors with Screen Printed and Interdigitated Electrodes

Flexible Carbon Nanotube Sensors with Screen Printed and Interdigitated Electrodes
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具有丝网印刷和叉指电极的柔性碳纳米管传感器

DOI:
10.1109/nano46743.2019.8993685
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发表时间:
2019
期刊:
2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO)
影响因子:
--
通讯作者:
P. Lugli
P. Lugli
中科院分区:
--
文献类型:
--
作者:
F. Loghin;Marco R. Bobinger;A. Rivadeneyra;M. Becherer;P. Lugli

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印刷电子是一个迅速崛起的领域,这是由于新型功能材料和油墨的发展,这些材料和油墨可以使用众所周知的和广泛建立的印刷技术来沉积。通常,印刷电路板(PCB)上的传感器结构或互连使用湿法蚀刻和光刻步骤来制造。为了克服这些技术的局限性,在这方面的贡献,我们使用一个简单的和可扩展的丝网印刷工艺存款银片为基础的叉指电极(IDE)结构喷涂碳纳米管(CNT)薄膜。银(Ag)结构显示出低的薄层电阻和0.14 Ω/sq的电阻率。和6.1 μ 10-7 μ m,厚度约为4.4 μm。由于其柔性和鲁棒性,选择聚酰亚胺箱(Kapton®HN)作为基底。然后将完全在环境空气中制造的具有印刷IDE的CNT膜表征为检测氨(NH3)的电阻式气体传感器。对于50 ppm的NH3浓度,实现了约20%的高响应。
Printed electronics is a rapidly emerging field due to the development of new types of functional materials and inks that can be deposited using well-known and widely established printing techniques. Commonly, sensor structures or interconnects on printed circuit boards (PCBs) are fabricated using wet etching and photolithography steps. To overcome the limitations of those techniques, in this contribution, we use a simple and scalable screen printing process to deposit silver-flake based interdigitated electrode (IDE) structures onto sprayed carbon nanotube (CNT) films. The silver (Ag) structures show a low sheet resistance and resistivity of 0.14 Ω/sq. and 6.1∙10-7 Ω∙m, respectively, at a thickness of around 4.4 µm. Attributed to its flexibility and robustness, a polyimide foil (Kapton®HN) was selected as the substrate. The CNT films with printed IDE that are entirely fabricated in the ambient air are then characterized as resistive gas sensors to detect ammonia (NH3). A high response of around 20% is achieved for an NH3 concentration of 50 ppm.
DOI: 10.1038/354056a0
发表时间: 1991-11-07
期刊: NATURE
影响因子: 64.8
作者:
IIJIMA, S
通讯作者: IIJIMA, S