A decade of MEMS and its future
A decade of MEMS and its future
复制标题
MEMS 的十年及其未来
DOI：
10.1109/memsys.1997.581729
复制
发表时间：
1997
期刊：
影响因子：
--
通讯作者：
Hiroyuki Fujita
中科院分区：
文献类型：
--
作者：
Hiroyuki Fujita
本文回顾了近十年来微机电系统（MEMS）的发展历史。对MEMS的研究课题也作了概述。主题包括微致动器，微传感器，微小型运动系统（如微型机器人），应用和所涉及的制造技术。MEMS应该在三个主要领域为21世纪的社会做出贡献，例如（1）更广泛地分配和更容易获得信息，（2）与环境相适应的生活方式和（3）改善社会福利。讨论了MEMS未来发展的技术问题。
This paper deals with a history of microelectromechanical system (MEMS) development in this decade. An overview of the MEMS research topics is also given. The topics include microactuators, microsensors, micro miniature motion-systems (e.g. microrobots), applications and the fabrication technology in involved. MEMS is supposed to contribute the 21th Century society in three major areas such as (1) wider distribution of and easier access to information, (2) compatible lifestyle with environment and (3) improvement in social welfare. The technological issues for future development of MEMS are discussed.