Optical properties of fluorinated diamond-like carbon films produced by pulsed glow discharge plasma immersion ion processing
Optical properties of fluorinated diamond-like carbon films produced by pulsed glow discharge plasma immersion ion processing
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DOI：
10.1063/1.373838
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发表时间：
2000-07
影响因子：
3.2
通讯作者：
M. Hakovirta;Xiao-Ming He;M. Nastasi
中科院分区：
文献类型：
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作者：
M. Hakovirta;Xiao-Ming He;M. Nastasi
利用1 Pa乙炔（C2H2）和六氟乙烷（C2F6）混合气体中的脉冲辉光放电等离子体在玻璃和聚甲基丙烯酸甲酯（PMMA）衬底上制备氟化类金刚石（F-DLC）薄膜。采用卢瑟福后向散射光谱和弹性后坐力检测分析技术测定了F-DLC涂层的成分。利用紫外/可见分光光度计测量了100 nm厚F-DLC涂层的透光率、吸收系数和光学带隙。摩擦磨损性能是用传统的针盘式装置测量的。此外，为了确定涂层的不润湿性能，还进行了接触角测量。结果表明，随着氟含量的增加，涂层的不润湿性能、透光率和光学带隙均有所提高。氟含量的增加抑制了氢的掺入，增加了光学带隙能量，这与普通带隙相比有很大的不同。
Pulsed glow discharge plasma from a 1 Pa gas mixture of acetylene (C2H2) and hexafluoroethane (C2F6) was used to produce fluorinated diamond-like carbon (F-DLC) films on glass and polymethyl-methacrylate (PMMA) substrate. The composition of the F-DLC coatings was measured by using Rutherford backscattering spectroscopy and elastic recoil detection analysis techniques. The transmittance, absorption coefficient, and optical band gap of 100 nm thick F-DLC coatings was measured by using an ultraviolet/visible spectrometer. The friction and wear properties were measured with a conventional pin-on-disk device. In addition, contact angle measurements were taken in order to determine the nonwetting properties of the coatings. The results showed an increase in nonwetting properties, transmittance, and optical band gap with increasing fluorine content in the coatings. The increased fluorine contents suppressed the incorporation of hydrogen and increased the optical band gap energy, which is quite different from the...