Measurements to 320 GHz of millimetre-wave waveguide components made by high precision and economic micro-machining techniques
Measurements to 320 GHz of millimetre-wave waveguide components made by high precision and economic micro-machining techniques
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采用高精度且经济的微加工技术对毫米波波导元件进行 320 GHz 测量
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
D. Steenson
中科院分区：
文献类型：
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作者：
W. Chow;A. Champion;D. Steenson
提出了一种将各种波导器件与集成E面电路集成在一起形成紧凑型毫米波子器件的新工艺。这些波导元件使用SU-8制成两半，使得电路可以放置在波导的E平面中，并容纳在专门设计的金属块中进行测量。该技术是足够灵活和可重复的，以便允许以低成本实现具有低损耗和优异表面光洁度的复杂3-D波导部件。各种矩形波导部分的工作频率从110到320 GHz的已制造和测量，以评估这种方法。
A new technique for the fabrication and integration of various waveguide components together with an integrated E-plane circuit to form a compact millimetre-wave subcomponent has been produced. These waveguide components were fabricated in two halves using SU-8 such that the circuits can be placed in the E-plane of the waveguide and accommodated in a specially designed metal block for measurement. This technique is sufficiently flexible and repeatable so as to permit complex 3-D waveguide components with low loss and excellent surface finish to be realised at low cost. Various rectangular waveguide sections with operating frequencies from 110 to 320 GHz have been fabricated and measured to evaluate this approach.