Multichannel quartz crystal microbalance array: Fabrication, evaluation, application in biomarker detection
Multichannel quartz crystal microbalance array: Fabrication, evaluation, application in biomarker detection
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多通道石英晶体微天平阵列：制造、评估、在生物标志物检测中的应用
DOI：
10.1016/j.ab.2015.11.001
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发表时间：
2016
影响因子：
2.9
通讯作者：
Xierong Zeng
中科院分区：
文献类型：
--
作者：
Wenyan Tao;Peng Lin;Yanqing Ai;Hairui Wang;Shanming Ke;Xierong Zeng
制备了一种具有三对金电极的多通道石英晶体微天平阵列（MQCM），用于丙酮和一氧化氮（NO）两种生物标志物的检测。使用光刻、溅射和剥离技术将金电极对称地沉积在AT切割的10 MHz圆形石英板上。研究了金层厚度对MQCM性能的影响，确定了最佳金层厚度为101 nm。MQCM器件的Butterween-Van Dike等效电路中的电参数C 0、Cq、Lq和R的模拟值分别为97 pF、1.3 pF、1.05 mH和9.8 Ω。仿真值在理论值范围内，表明所制备的MQCM器件具有良好的谐振性能。合成了二氧化钛-多壁碳纳米管和酞菁钴-二氧化硅两种纳米复合材料作为传感材料。该传感机理是基于目标分子在传感材料上的配位吸附，导致修饰QCM传感器的谐振频率偏移。丙酮的线性范围为4.33 - 129.75ppmv，NO的线性范围为5.75 - 103.45ppbv。
A multichannel quartz crystal microbalance array (MQCM) with three pairs of gold electrodes was fabricated for detection of two biomarkers: acetone and nitric oxide (NO). The gold electrodes were deposited symmetrically on an AT-cut 10 MHz circular quartz plate using photolithography, sputtering, and lift-off technologies. The effect of gold layer thickness on MQCM performance was investigated and the optimized thickness was 101 nm. The simulation values of the electric parametersC0,Cq,Lq, andRqin the Butterworth–Van Dike equivalent circuit for the MQCM device were 97 pF, 1.3 pF, 1.05 mH, and 9.8 Ω, respectively. Simulation values were in the theoretical range, which indicated that the fabricated MQCM device had good resonance performance. Two types of nanocomposites, titanium dioxide–multiwalled carbon nanotubes and cobalt (II)phthalocyanine–silica, were synthesized as sensing materials. The sensing mechanism is based on coordination adsorption of target molecules onto the sensing material, resulting in a resonant frequency shift of modified QCM sensor. A linear range from 4.33 to 129.75 ppmv for acetone was obtained and one from 5.75 to 103.45 ppbv for NO.