Preliminary study on development of 300 Kv compact focused gaseous ion beam system
Preliminary study on development of 300 Kv compact focused gaseous ion beam system
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300Kv紧凑型聚焦气体离子束系统研制初步研究
DOI:
10.1063/1.4802353
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发表时间:
2013
期刊:
影响因子:
--
通讯作者:
and T. Kamiya
中科院分区:
文献类型:
--
作者:
T. Ohkubo;Y. Ishii;Y. Miyake;and T. Kamiya