Ion irradiation-induced sputtering and surface modification of BN films prepared by a reactive plasma-assisted coating technique
Ion irradiation-induced sputtering and surface modification of BN films prepared by a reactive plasma-assisted coating technique
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反应等离子体辅助涂层技术制备BN薄膜的离子辐照诱导溅射和表面改性
DOI：
10.35848/1347-4065/ac5d16
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发表时间：
2022
影响因子：
1.5
通讯作者：
and Koji Eriguchi
中科院分区：
文献类型：
--
作者：
Takayuki Matsuda;Takashi Hamano;Yuya Asamoto;Masao Noma;Michiru Yamashita;Shigehiko Hasegawa;Keiichiro Urabe;and Koji Eriguchi
