Friction drive surface acoustic wave motor
Friction drive surface acoustic wave motor
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DOI：
10.1016/0041-624x(96)81781-1
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发表时间：
1996-06-01
期刊：
影响因子：
4.2
通讯作者：
Higuchi, T
中科院分区：
文献类型：
--
作者：
Kurosawa, M;Takahashi, M;Higuchi, T
我们已经成功地利用瑞利波的超声波直线电机的操作。我们使用3英寸，127.8度，Y形切割的LiNbO 3晶片。布置四个IDT以在两个方向上激发x传播波和y传播波。IDT的尺寸为25 mm孔径尺寸、400 μ m间距、100 μ m条带宽度，并且有10对。手术面积约25 mm（2）。驱动频率在x方向上为约9.6MHz，在y方向上为约9.1MHz。最重要的一点是接触表面的形状和滑块材料。对于接触材料，引入直径约1 mm的小球以获得足够高的接触压力，约100 MPa。我们尝试了红宝石球，钢球和碳化钨球。每个滑块有三个球，以获得稳定的接触在三个点。最大传输速度约为20 cm·s ~（-1）。通过改变驱动电压可以控制转移速度。
We have succeeded in the operation of an ultrasonic linear motor using Rayleigh waves. We used a 3 inch, 127.8 degrees, Y-cut LiNbO3 wafer. Four IDTs were arranged to excite the x-propagation wave and the y-propagation wave in both directions. The dimensions of the IDT were 25 mm aperture size, 400 mu m pitch, 100 mu m strip width, and there were 10 pairs. The operation area was about 25 mm(2). The driving frequency was about 9.6 MHz in the x-direction and about 9.1 MHz in the y-direction. The most important point was the shape of contact surface and the slider material. For the contact materials, small balls about 1 mm in diameter are introduced to obtain a high enough contact pressure, around 100 MPa. We tried ruby balls, steel balls and tungsten carbide balls. Each slider has three balls to get stable contact at three points. The maximum transfer speed was about 20 cm s(-1). The transfer speed was controllable by changing the driving voltage.