Comparison of the Fluorine Atom Density Measured by Actinometry and Vacuum Ultraviolet Absorption Spectroscopy
Comparison of the Fluorine Atom Density Measured by Actinometry and Vacuum Ultraviolet Absorption Spectroscopy
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光化法与真空紫外吸收光谱法测量氟原子密度的比较
DOI：
10.1143/jjap.36.l1261
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发表时间：
1997
影响因子：
1.5
通讯作者：
K. Kadota
中科院分区：
文献类型：
--
作者：
Y. Kawai;K. Sasaki;K. Kadota
通过与真空紫外吸收光谱法测量结果的比较，验证了光化法测量氟原子密度的有效性。实验在螺旋波放电激发的高密度CF 4和C4 F8等离子体中进行。结果表明，对于相同的工作气体，用光化法测量的相对F原子密度的误差在~2倍之内。另一方面，在CF_4和C_4F_8等离子体中，光辐射关系式n F = Kn Ar（IF/I Ar）中的K值有很大的不同。因此，评价的绝对F原子密度的光化法一般是困难的，除了粗略的顺序估计取代K 2。
The validity of actinometry for measurement of fluorine atom density was examined by comparing the results with those obtained by vacuum ultraviolet absorption spectroscopy. The experiments were carried out in high-density CF4 and C4F8 plasmas excited by helicon-wave discharges. As a result, the error in the relative F atom density measured by actinometry was within a factor of ~2 for the same working gas. On the other hand, the value of K in the actinometry relation n F = Kn Ar (I F/I Ar) was considerably different between the CF4 and C4F8 plasmas. Hence evaluation of the absolute F atom density by actinometry is generally difficult, except for rough order-estimation by substituting K 2.