Real time observation of reflectance anisotropy and reflection high-energy electron diffraction intensity oscillations during gas-source molecular-beam-epitaxy growth of Si and SiGe on Si(001).
Real time observation of reflectance anisotropy and reflection high-energy electron diffraction intensity oscillations during gas-source molecular-beam-epitaxy growth of Si and SiGe on Si(001).
复制标题
实时观察Si(001)上气源分子束外延生长Si和SiGe过程中的反射率各向异性和反射高能电子衍射强度振荡。
DOI:
10.1016/0022-0248(95)80093-r
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发表时间:
1995
影响因子:
8.6
通讯作者:
Taylor
中科院分区:
文献类型:
--
作者:
Turner;Pemble;Fernández;Joyce;Zhang;Taylor