Harmonic Operation of Acoustic Transducer for Droplet Ejection Application
Harmonic Operation of Acoustic Transducer for Droplet Ejection Application
复制标题
用于液滴喷射应用的声学换能器的谐波操作
DOI：
10.1109/sensor.2007.4300372
复制
发表时间：
2007
期刊：
影响因子：
--
通讯作者：
E. S. Kim
中科院分区：
文献类型：
--
作者：
Chuang;Hongyu Yu;E. S. Kim
本文报道了使用谐波频率的声喷射，以喷射微米尺寸的液滴。对于工作在厚度模式谐振的声学喷射器，液滴尺寸主要由声波波长决定，声波波长与压电基板厚度成比例。在新发明的设计中，我们不搭接体压电PZT衬底或使用PZT薄膜，而是使用体形式的谐波频率来减小波长。利用谐波频率的声喷射器已被制造，并显示出是非常有效的第9谐波（~180 MHz），喷射小至10 μ m直径的液滴。
This paper reports the use of harmonic frequencies for acoustic ejection in order to eject micron-sized droplets. For an acoustic ejector working at the thickness-mode resonance, the droplet size is primarily determined by the acoustic wavelength, which is proportional to the piezoelectric substrate thickness. In the newly invented design, we do not lap the bulk piezoelectric PZT substrate or use PZT thin films, but use harmonic frequencies of the bulk form to reduce the wavelength. The acoustic ejectors utilizing harmonic frequencies have been fabricated and shown to be very effective up to the 9th harmonic (~180 MHz), ejecting droplets as small as 10 mum in diameter.