Room temperature deposition of freestanding BaTiO3 films: temperature-induced irreversible structural and chemical relaxation
Room temperature deposition of freestanding BaTiO3 films: temperature-induced irreversible structural and chemical relaxation
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DOI：
10.1007/s10853-022-07467-3
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发表时间：
2022-07
影响因子：
4.5
通讯作者：
Udo Eckstein;N. Khansur;M. Bergler;D. Urushihara;T. Asaka;K. Kakimoto;Matej Šadl;Mirela Dragomir;H. Uršič;D. de Ligny;K. Webber
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文献类型：
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作者：
Udo Eckstein;N. Khansur;M. Bergler;D. Urushihara;T. Asaka;K. Kakimoto;Matej Šadl;Mirela Dragomir;H. Uršič;D. de Ligny;K. Webber
室温气溶胶沉积法特别有希望快速沉积陶瓷厚膜，使其成为能源，移动和电信应用中的功能部件。尽管如此，仍然存在许多挑战，例如增强的电导率和沉积膜中的内部残余应力。在这项工作中，一种集成了牺牲水溶性缓冲层的新技术被用于制造独立的陶瓷厚膜，它允许直接观察膜，而不受衬底或事先热处理的影响。在这里，通过表征热膨胀特性和温度依赖的晶体结构作为氧分压的函数，直接研究了独立batio3薄膜中的温度依赖的化学和结构弛豫现象，其中在加热过程中观察到明显的非线性滞后收缩，这被认为是受晶格缺陷的影响。因此，利用共价掺杂和气氛相关的退火实验来证明局部化学再分布和氧空位对热膨胀的影响，从而深入了解沉积膜的高室温电导率的起源，并更深入地了解室温沉积功能陶瓷厚膜中诱导的化学，结构和微观结构变化的影响。图形抽象
The room temperature aerosol deposition method is especially promising for the rapid deposition of ceramic thick films, making it interesting for functional components in energy, mobility, and telecommunications applications. Despite this, a number of challenges remain, such as an enhanced electrical conductivity and internal residual stresses in as-deposited films. In this work, a novel technique that integrates a sacrificial water-soluble buffer layer was used to fabricate freestanding ceramic thick films, which allows for direct observation of the film without influence of the substrate or prior thermal treatment. Here, the temperature-dependent chemical and structural relaxation phenomena in freestanding BaTiO3films were directly investigated by characterizing the thermal expansion properties and temperature-dependent crystal structure as a function of oxygen partial pressure, where a clear nonlinear, hysteretic contraction was observed during heating, which is understood to be influenced by lattice defects. As such, aliovalent doping and atmosphere-dependent annealing experiments were used to demonstrate the influence of local chemical redistribution and oxygen vacancies on the thermal expansion, leading to insight into the origin of the high room temperature conductivity of as-deposited films as well as greater insight into the influence of the induced chemical, structural, and microstructural changes in room temperature deposited functional ceramic thick films.Graphical abstract