Enhancement of Ohmic heating by Hall current in magnetized capacitively coupled discharges
Enhancement of Ohmic heating by Hall current in magnetized capacitively coupled discharges
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DOI：
10.1088/1361-6595/ab419d
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发表时间：
2019-09
影响因子：
3.8
通讯作者：
B. Zheng;Keliang Wang;T. Grotjohn;T. Schuelke;Q. Fan
中科院分区：
文献类型：
--
作者：
B. Zheng;Keliang Wang;T. Grotjohn;T. Schuelke;Q. Fan
在低压电容耦合放电中，通过施加一个小的横向磁场，可以知道加热模式从压力加热主导状态转变为欧姆加热主导状态。在这里，我们通过细胞内粒子模拟和玻尔兹曼方程的力矩分析证明了欧姆加热的增强是由E × B方向的霍尔电流引起的。随着磁场的增大，E × B方向的欧姆加热主导了总电子功率吸收。霍尔电流引起的欧姆加热可以很好地近似于非磁化电容耦合放电的欧姆加热。
In low-pressure capacitively coupled discharges, a heating mode transition from a pressure-heating dominated state to an Ohmic-heating dominated state is known by applying a small transverse magnetic field. Here we demonstrate via particle-in-cell simulations and a moment analysis of the Boltzmann equation that the enhancement of Ohmic heating is induced by the Hall current in the E × B direction. As the magnetic field increases, the Ohmic heating in the E × B direction dominates the total electron power absorption. The Ohmic heating induced by the Hall current can be well approximated from the Ohmic heating of unmagnetized capacitively coupled discharges.