Interface strength of structured nanocolumns grown by glancing angle deposition
Interface strength of structured nanocolumns grown by glancing angle deposition
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DOI：
10.1016/j.engfracmech.2011.08.005
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发表时间：
2011-11
影响因子：
5.4
通讯作者：
H. Hirakata;Taku Nishihira;A. Yonezu;K. Minoshima
中科院分区：
文献类型：
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作者：
H. Hirakata;Taku Nishihira;A. Yonezu;K. Minoshima
为了研究掠射角沉积（GLAD）生长的结构化纳米元件的界面断裂力学，使用微砖样品在硅衬底上生长的倾斜钛纳米柱上进行了断裂实验。制备了两种类型的样品，即正向样品（沿柱倾斜方向加载）和反向样品（逆柱倾斜方向加载），以阐明不对称纳米结构对界面强度的影响。两个样品的样品均在钛纳米柱和硅基底之间的界面或界面附近断裂。正向试样断裂时的临界力和位移分别约为反向试样的2.0倍和1.6倍，界面强度表现出明显的各向异性。通过有限元分析分析了单纳米柱断裂时沿界面的局部应力分布。虽然反向样本中的应力奇异性大于正向样本中的应力奇异性，但无论加载方向如何，靠近界面边缘的1-3nm区域中的正应力几乎相同，这表明纳米级区域中的强化应力主导了断裂。
In order to investigate the mechanics of interfacial fracture in structured nano-elements grown by glancing angle deposition (GLAD), fracture experiments were conducted on oblique Ti nanocolumns grown on a Si substrate using a micro-brick specimen. Two types of specimens, a Forward specimen (loading with the column tilt direction) and a Reverse specimen (loading against the column tilt), were prepared to clarify the effect of an asymmetric nanostructure on the interface strength. The specimens fractured at the interface or near the interface between the Ti nanocolumns and the Si substrate for both specimens. The critical force and displacement at fracture in the Forward specimens were about 2.0 times and 1.6 times as large as those in the Reverse specimens, respectively, showing clear anisotropy in the interface strength. The local stress distribution along the interface in the single nanocolumn at fracture was analyzed by finite element analysis. While the stress singularity in the Reverse specimen was greater than that in the Forward specimen, the normal stresses in a region 1–3nm near the interface edge were almost identical regardless of the loading direction, suggesting that intensified stress in the nanoscale region dominated fracture.