Comparison of circular flexure hinge design equations and the derivation of empirical stiffness formulations

Comparison of circular flexure hinge design equations and the derivation of empirical stiffness formulations
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圆形柔性铰链设计方程的比较和经验刚度公式的推导

DOI:
10.1109/aim.2009.5229961
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发表时间:
2009
期刊:
2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics
影响因子:
--
通讯作者:
Tien
Tien
中科院分区:
--
文献类型:
--
作者:
Y. Yong;Tien

文献摘要

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柔性铰链广泛应用于要求在纳米尺度上精确、平稳运动的许多应用场合。用不同的方法推导出了计算圆形柔性铰链刚度的各种公式。本文将这些方程与有限元预测进行了比较。揭示了这些方程在不同t/R比(R为半径,t为颈厚)下的局限性。基于这些设计公式的局限性,提出了一种选择最准确的铰链设计计算公式的准则。除了回顾和比较,本研究还建立了大范围t/R比(0.05≤t/R≤0.8)下x和y方向的通用经验刚度方程(与有限元模拟相比误差小于3%)。
Flexure hinges are commonly used in many applications which require precise and smooth motions in the nanometer scale. There were various formulations derived using different methods to calculate the stiffness of circular flexure hinges. This article compares these equations with FEA predictions. The limitation of these equations at different t/R (R is the radius and t is the neck thickness) ratios are revealed. Based on the limitations of these design equations, a guideline to select the most accurate equations for hinge design calculations is presented. In addition to the review and comparisons, general empirical stiffness equations in the x- and y-direction were formulated in this study (with errors less than 3% when compared to FEA simulations) for a wide range of t/R ratios (0.05 ≤ t/R ≤ 0.8).