Generation of laser-induced periodic surface structures in indium-tin-oxide thin films and two-photon lithography of ma-N photoresist by sub-15 femtosecond laser microscopy for liquid crystal cell application
Generation of laser-induced periodic surface structures in indium-tin-oxide thin films and two-photon lithography of ma-N photoresist by sub-15 femtosecond laser microscopy for liquid crystal cell application
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DOI：
10.1117/12.2076946
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发表时间：
2015-03
影响因子：
3.6
通讯作者：
M. Klötzer;M. Afshar;D. Feili;H. Seidel;K. König;M. Straub
中科院分区：
文献类型：
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作者：
M. Klötzer;M. Afshar;D. Feili;H. Seidel;K. König;M. Straub
氧化铟锡（ITO）由于其在可见光谱范围内的透明性和其高导电性而被广泛用于液晶电池应用的电极材料。重要的应用实例是显示器和光学相位调制器。我们报告的亚波长周期性结构和精确的激光切割的150 nm厚的铟锡氧化物薄膜的玻璃基板上，这是通过磁控反应直流溅射从铟锡靶在低压氧气气氛中沉积。为了获得纳米结构的电极激光诱导的周期性表面结构的周期约为100 nm的产生，使用紧密聚焦的高重复率的子15飞秒脉冲钛：蓝宝石激光，这是扫描整个样品的检流计镜。在ITO层顶部旋涂的ma-N 2410负性光刻胶中通过多光子光聚合产生三维间隔物。纳米结构的电极平行排列，以建立电可切换的双折射液晶单元。
Indium-tin-oxide (ITO) is a widely used electrode material for liquid crystal cell applications because of its transparency in the visible spectral range and its high electrical conductivity. Important examples of applications are displays and optical phase modulators. We report on subwavelength periodic structuring and precise laser cutting of 150 nm thick indium-tin-oxide films on glass substrates, which were deposited by magnetron reactive DC-sputtering from an indiumtin target in a low-pressure oxygen atmosphere. In order to obtain nanostructured electrodes laser-induced periodic surface structures with a period of approximately 100 nm were generated using tightly focused high-repetition rate sub-15 femtosecond pulsed Ti:sapphire laser light, which was scanned across the sample by galvanometric mirrors. Three-dimensional spacers were produced by multiphoton photopolymerization in ma-N 2410 negative-tone photoresist spin-coated on top of the ITO layers. The nanostructured electrodes were aligned in parallel to set up an electrically switchable nematic liquid crystal cell.