A digital CMOS architecture for a micro-hotplate array
A digital CMOS architecture for a micro-hotplate array
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DOI：
10.1109/jssc.2006.889367
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发表时间：
2007-02-01
影响因子：
5.4
通讯作者：
Hierlemann, Andreas
中科院分区：
文献类型：
--
作者：
Frey, Urs;Graf, Markus;Hierlemann, Andreas
提出了一种采用工业CMOS技术和后CMOS微加工相结合的单片气体传感器阵列。该设备。包括三个金属氧化物涂层的微热板阵列，集成了MOS晶体管加热器和所需的驱动和信号调理电路。三个数字PID控制器使每个加热板单独调节温度。SnO2金属氧化物传感器的工作温度可达350摄氏度。串行接口和温度控制单元已实现数字化。重点放在设计一个模块化系统与所需的模拟电路减少到最低限度。凭借其5.5 x 4.5 mm(2)的小整体尺寸，其数字接口和6℃/mW的良好热板热效率，该系统代表了低成本移动气体传感器系统的重大发展。据评估，在恒温条件下，CO的检出限低于1ppm， CH4的检出限约为100ppm。这三种传感器的最大采样率为9.3 kHz，主要采用数字实现，具有应用节能模式和温度调制技术来增强分析物识别能力的优势。
A monolithic gas sensor array fabricated in industrial CMOS technology combined with post-CMOS micromachining is presented. The device. comprises an array of three metal-oxide-coated micro-hotplates with integrated MOS transistor heaters and the needed driving and signal-conditioning circuitry. Three digital PID controllers enable individual temperature regulation for each hotplate. The operating temperature of the SnO2 Metal-oxide sensors may amount up to 350 degrees C. A serial interface and the temperature control units have been implemented digitally. Emphasis was put on designing a modular system with the required analog circuitry reduced to a minimum. With its small overall size of 5.5 x 4.5 mm(2) its digital interface and its good hotplate thermal efficiency of 6 degrees C/mW, the system represents a significant development on the way to low-cost mobile gas sensor systems. The limit of detection at constant temperatures has been assessed to be below 1 ppm for CO and approximately 100 ppm for CH4. The mainly digital implementation with a maximum sampling rate of 9.3 kHz for all three sensors offers the advantage to apply a power-saving mode and temperature modulation techniques to enhance the analyte discrimination capability.