Micro-three dimensional shape measurement method based on shadow Moiré using scanning electron microscopy
Micro-three dimensional shape measurement method based on shadow Moiré using scanning electron microscopy
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DOI：
10.1080/09500340600809285
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发表时间：
2006-12
影响因子：
1.3
通讯作者：
Y. Arai;S. Yokozeki
中科院分区：
文献类型：
--
作者：
Y. Arai;S. Yokozeki
提出了一种利用扫描电子显微镜（SEM）和莫尔形貌术进行三维形貌测量的新方法。根据实验结果，讨论了用这种方法测量波长级的可能性，以证实其原理。在这些实验中，提出了一种基于新的测量方法的高分辨率的方法，采用条纹扫描技术的阴影莫尔。该光学系统由使用背散射电子的SEM、可以移动光栅位置的光栅保持器和具有120 µm间距的光栅构成。测量结果表明，使用条纹扫描方法和新的测量安排，可以进行约1微米的高分辨率测量轴承球作为样品。对该方法进行了误差分析，以提高测量精度。
A novel, precise, three-dimensional shape measurement method using scanning electron microscopy (SEM) and Moiré topography has been proposed. The possibility for measurement of wavelength order using this method is discussed based on results of experiments to confirm the principle. In these experiments, a high-resolution method based on the new measurement method is proposed, employing fringe scanning technology for the shadow Moiré. The optical system is constructed with a SEM using backscattering electrons, a grating holder that can shift the position of the grating, and a grating having a pitch of 120 µm. Measured results using a bearing ball as a sample show that high resolution measurements of around one micrometre can be performed using the fringe scanning method and the new measurement arrangement. An error analysis of the method is performed to enable improvement of the measuring accuracy.