An application of a silica-on-terraced-silicon platform to hybrid Mach-Zehnder interferometric circuits consisting of silica-waveguides and LiNbO/sub 3/ phase-shifters
An application of a silica-on-terraced-silicon platform to hybrid Mach-Zehnder interferometric circuits consisting of silica-waveguides and LiNbO/sub 3/ phase-shifters
复制标题
硅平台上二氧化硅平台在由二氧化硅波导和 LiNbO/sub 3/ 移相器组成的混合马赫-曾德尔干涉电路中的应用
DOI：
10.1109/68.311466
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发表时间：
1994
影响因子：
2.6
通讯作者：
T. Hashimoto
中科院分区：
文献类型：
--
作者：
Y. Yamada;A. Sugita;K. Moriwaki;I. Ogawa;T. Hashimoto
通过使用硅基台阶式二氧化硅平台（STS平台）进行光学混合集成，我们制造了一种由二氧化硅波导定向耦合器和铌酸锂（LiNbO₃）相移器阵列组成的混合马赫 - 曾德尔干涉电路。该电路用作光开关，其插入损耗为6.0 dB（包括输入和输出光纤耦合损耗），消光比优于20 dB。由此证实STS平台集成了高性能平面光波电路和硅光平台。
By using a silica-on-terraced-silicon platform (STS-platform) for optical hybrid integration, we fabricated a hybrid Mach-Zehnder interferometric circuit consisting of silica-waveguide directional couplers and a LiNbO/sub 3/ phase-shifter array. The circuit functioned as an optical switch with an insertion loss of 6.0 dB including input and output fiber coupling loss and an extinction ratio of better than 20 dB. The STS-platform was thus confirmed to incorporate both a high-performance planar lightwave circuit and a silicon optical bench.<<ETX>>