A MEMS gravimeter with multi-axis gravitational sensitivity
A MEMS gravimeter with multi-axis gravitational sensitivity
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DOI：
10.1109/inertial53425.2022.9787754
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发表时间：
2021-02
期刊：
影响因子：
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通讯作者：
R. Middlemiss;P. Campsie;W. Cunningham;R. Douglas;Victoria McIvor;Vinod Belwanshi;J. Hough;S. Row
中科院分区：
文献类型：
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作者：
R. Middlemiss;P. Campsie;W. Cunningham;R. Douglas;Victoria McIvor;Vinod Belwanshi;J. Hough;S. Row
格拉斯哥大学最近开发出了一种单轴微机电系统重力仪。通过测量地球潮汐证明了该装置的灵敏度和稳定性。该设备的成功部分归功于其极低的谐振频率。这种低频是通过几何抗弹簧设计实现的，该设计使用成熟的光刻和干蚀刻技术制造。解析模型可用于计算这些非线性振荡系统的结果，但迄今为止，有限元分析的能力尚未充分利用来探索参数空间。在本文中，有限元模型用于研究几何反弹簧的行为。这些计算机模型提供了研究器件制造材料：各向异性晶体硅的影响的能力。这是一个很难通过分析研究的参数，但使用有限元建模来考虑各向异性。然后，有限元模型用于演示能够测量重力张量的三轴重力仪的设计，这是一种比原始单轴设备更强大的工具。
A single-axis Microelectromechanical system gravimeter has recently been developed at the University of Glasgow. The sensitivity and stability of this device was demonstrated by measuring the Earth tides. The success of this device was enabled in part by its extremely low resonant frequency. This low frequency was achieved with a geometric anti-spring design, fabricated using well-established photolithography and dry etch techniques. Analytical models can be used to calculate the results of these non-linear oscillating systems, but the power of finite element analysis has not been fully utilised to explore the parameter space before now. In this article finite element models are used to investigate the behaviour of geometric anti-springs. These computer models provide the ability to investigate the effect of the fabrication material of the device: anisotropic crystalline silicon. This is a parameter that is difficult to investigate analytically, but finite element modelling is used to take anisotropy into account. The finite element models are then used to demonstrate the design of a three-axis gravimeter enabling the gravity tensor to be measured - a significantly more powerful tool than the original single-axis device.