MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness (MEMS Reference Shelf)
MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness (MEMS Reference Shelf)
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发表时间：
2008-10
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通讯作者：
C. Acar;A. Shkel
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文献类型：
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作者：
C. Acar;A. Shkel
MEMS振动陀螺仪为微机械振动速率陀螺仪的理论和基本操作原理提供了坚实的基础，并引入了针对结构和环境变化提供固有鲁棒性的结构设计。在第一部分中，振动陀螺仪敏感元件的动力学的发展，常见的微加工工艺和方法，通常用于惯性传感器的生产进行了总结，设计的机械结构，为线性和扭转陀螺仪，和电气驱动和检测方法进行了讨论沿着详细的MEMS陀螺仪的实验特性。在第二部分中，介绍了提高微机械传感元件的鲁棒性的设计概念，由说明材料的建设性计算实例和实验结果支持。
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.