Recent developments in soft X-ray emission spectroscopy microscopy
Recent developments in soft X-ray emission spectroscopy microscopy
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软X射线发射光谱显微镜的最新进展
DOI：
10.1088/1757-899x/891/1/012022
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发表时间：
2020
期刊：
影响因子：
--
通讯作者：
Murano T
中科院分区：
文献类型：
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作者：
Terauchi M;Hatano T;Koike M;Pirozhkov A S;Sasai H;Nagano T;Takakura M;Murano T
本文讨论了用于EPMA/SEM的软X射线发射光谱仪系统的商业化途径，其应用，如何用于研究新材料，并提供了正在研究的改进以进一步优化性能的最新信息。最终的能量分辨率为0.08 eV的Al L-费米边缘显示与当前的光学使用精细像素探测器。光谱映射技术可以通过使用适当的感兴趣区域能量窗口来显示化学位移图像。3d过渡金属元素的L-发射不仅提供了键合态密度，而且还提供了外层或3d电子的数量。此外，导致检测效率提高的进展已经导致B K-发射峰增加三倍以上。本文介绍了一种新的电子探针高能量分辨谱仪的测试和评价，以及一种新的石墨C K峰能量标定方法。
This paper discusses the path to the commercialization of a soft-X-ray emission spectrometer system for EPMA/SEM, its application, how it can be used to investigate new materials, and offers an update on improvements being investigated to further optimise the performance. The ultimate energy resolution of 0.08 eV at Al L-Fermi edge is shown with current optics using a fine pixel detector. The spectral mapping technique can show chemical shift images by using an appropriate region-of-interest energy window. L-emissions of 3d transition metal elements inform one not only of the density of states of bonding but also the number of outer shell or 3d electrons. Furthermore, progress leading to improvements in the detection efficiency has resulted in more than three times increase in the B K-emission peak. Testing and evaluation of new high energy-resolution spectrometer for EPMA, and a new calibration procedure for C K-peak on graphite has resulted in improved energy calibration procedure is presented.