Nanothermoforming of hierarchical optical components utilizing shape memory polymers as active molds

Nanothermoforming of hierarchical optical components utilizing shape memory polymers as active molds
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利用形状记忆聚合物作为主动模具对分层光学元件进行纳米热成型

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发表时间:
2014
期刊:
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通讯作者:
M. Worgull
M. Worgull
中科院分区:
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文献类型:
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作者:
N. Schneider;Claudia Zeiger;A. Kolew;M. Schneider;J. Leuthold;H. Hölscher;M. Worgull

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我们利用形状记忆聚合物作为主动模具嵌件,对具有大规模底切的复杂分层纳米和微米结构光学元件进行热成型。我们的方法将纳米压印/热压花和热成型与形状记忆聚合物的独特功能相结合。作为这种纳米和微米热成型工艺的示例,我们展示了受蓝色闪蝶启发的分层光子结构的制造以及具有纳米和微米尺寸结构的衍射光学元件。
We utilize shape memory polymers as active mold inserts for the thermoforming of complex, hierarchical nano- and microstructured optical components with undercuts on large scales. Our approach combines nanoimprint/hot embossing and thermoforming with the unique features of shape memory polymers. As examples for this nano- and microthermo-forming process, we demonstrate the fabrication of hierarchical photonic structures inspired by the blue Morpho butterfly as well as diffractive optical elements with nm- and μm-size structures.