Simultaneous in situ measurements of properties of particulates in rf silane plasmas using a polarization-sensitive laser-light-scattering method
Simultaneous in situ measurements of properties of particulates in rf silane plasmas using a polarization-sensitive laser-light-scattering method
复制标题
DOI：
10.1063/1.360916
复制
发表时间：
1996
影响因子：
3.2
通讯作者：
M. Shiratani;Hiroharu Kawasaki;T. Fukuzawa;T. Yoshioka;Y. Ueda;Sanjay Singh;Yukio Watanabe
中科院分区：
文献类型：
--
作者：
M. Shiratani;Hiroharu Kawasaki;T. Fukuzawa;T. Yoshioka;Y. Ueda;Sanjay Singh;Yukio Watanabe
开发了一种偏振敏感激光光散射方法，用于同时原位测量加工等离子体中形成的颗粒的性质（尺寸，尺寸色散，密度和折射率）。该系统可用于观察射频硅烷等离子体中粒径大于10nm的颗粒的生长过程。等离子体中粒子的尺寸，尺寸色散（尺寸标准差的对数），密度和折射率分别为10-200 nm，约0.1,107-109 cm−3和约3 - 5i。前三个值与扫描电镜（SEM）观测所得值相当吻合。这些颗粒的生长经历成核初期生长、快速生长和生长饱和三个阶段。在SEM观察证实的快速生长阶段和之后，两种粒径分散较窄的颗粒群共存，可以用考虑相反带电颗粒之间凝聚的模型来解释。
A polarization‐sensitive laser‐light‐scattering method is developed for simultaneous in situ measurements of properties (size, size dispersion, density, and refractive index) of particulates formed in processing plasmas. The developed system is applied to observe the growth processes of particulates in a range of their size larger than about 10 nm in rf silane plasmas. A size, a size dispersion (logarithm of a standard deviation of size), a density, and a refractive index of particulates in the plasmas are found to be 10–200 nm, about 0.1, 107–109 cm−3 and about 3–5i, respectively. The former three of such values agree fairly well with ones deduced from scanning electron microscopic (SEM) observation. These particulates grow through three phases of nucleation and initial growth, rapid growth, and growth saturation. Coexistence of two size groups of particulates with narrow size dispersions during and after the rapid growth phase verified by the SEM observation may be explained by a model taking into account coagulation between oppositely charged particulates.