Integrating micromachined fast response temperature sensor array in a glass microchannel
Integrating micromachined fast response temperature sensor array in a glass microchannel
复制标题
将微机械快速响应温度传感器阵列集成在玻璃微通道中
DOI：
10.1016/j.sna.2005.04.019
复制
发表时间：
2005
影响因子：
4.6
通讯作者：
H. Qiu
中科院分区：
文献类型：
--
作者：
Zhenlan Xue;H. Qiu
全玻璃微器件由于具有光学诊断和观察的可能性，在微全分析系统、激光显微外科、微热管和微流体研究等领域引起了广泛的兴趣。然而，由于技术限制，将检测系统（如集成传感器）集成到玻璃微通道中是困难的。提出了一种在玻璃微通道内集成微机械快速响应温度传感器阵列的微加工工艺。结合新开发的两种不同的玻璃材料阳极键合、通道蚀刻、硅温度探测器的制造，使得制造具有集成温度探测器阵列的玻璃微通道成为可能。为了适应新材料的引入，对注入工艺和通道刻蚀技术进行了改进。并对集成温度阵列的动态响应进行了标定。测试了集成温度传感器阵列在玻璃微通道中的响应时间为1.5μs。
Total glass microdevices have attracted wide interest in the development of micro total analysis systems (μTAS), laser microsurgery, micro heat pipes and microfluidics researches because of the possibility for optical diagnostics and observations. The integration of a detection system, such as integrated sensors into a glass microchannel, however, was difficult due to technology constraints. A microfabrication process integrating a micromachined fast response temperature sensor array inside a glass microchannel is presented. Combining of newly developed two different glass materials anodic bonding, channel etching, fabrication of silicon temperature detectors, makes the fabrication of a glass microchannel with an integrated temperature detector array possible. The implantation process and the channel etching technology were ameliorated to adapt to the new material introduced. The dynamic response of the integrated temperature array has also been calibrated. The response time of the integrated temperature sensor array was examined to be 1.5μs in the glass microchannel.