Low cost of ownership KrF excimer laser using a novel pulse power and chamber configuration
Low cost of ownership KrF excimer laser using a novel pulse power and chamber configuration
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拥有成本低 KrF 准分子激光器采用新颖的脉冲功率和腔室配置
DOI：
10.1117/12.209294
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发表时间：
1995
影响因子：
1.5
通讯作者：
P. P. Das
中科院分区：
文献类型：
--
作者：
W. Partlo;R. Sandstrom;I. Fomenkov;P. P. Das
研究了一种采用全固态脉冲功率调制器的KrF准分子激光器。这种PPM配置将常用的闸流管开关替换为带有脉冲压缩电压倍增电路的可控硅（SCR）开关。使用这种PPM可以将线窄KrF准分子激光器的有效腔室寿命从15亿脉冲延长到25亿脉冲。针对基于反射镜的扫描系统优化的宽带KrF激光器性能也进行了研究。这种固态PPM已经证明了50亿个脉冲的最低宽带腔寿命。虽然基于闸流管的PPM显示出30亿个脉冲的预期寿命，但在这些实验中使用的固态PPM已经运行了超过60亿个脉冲，而性能没有任何下降。由于ELS-4000D窄线准分子激光器更换零件成本的72%是由于定期更换腔室和PPM，因此通过延长腔室和PPM的使用寿命可以实现显着的拥有成本降低。
A KrF excimer laser using an all solid state Pulse Power Modulator (PPM) has been studied. This PPM configuration replaces the commonly used thyratron switch with a Silicon Controlled Rectifier (SCR) switch combined with a pulse compression-voltage multiplication circuit. Use of this PPM has extended the useful chamber life of a line-narrowed KrF excimer laser from 1.5 billion to 2.5 billion pulses. Broadband KrF laser performance, optimized for mirror based scanner systems, has also been investigated. A minimum broadband chamber life of 5 billion pulses has been demonstrated with this solid state PPM. While a thyratron-based PPM exhibits an expected lifetime of 3 billion pulses, the solid state PPM used in these experiments has been operated for greater than 6 billion pulses without any decrease in performance. Since 72% of the replacement parts cost for the ELS-4000D line-narrowed excimer laser is due to periodic chamber and PPM replacement, significant cost of ownership reduction is realized by extending the lifetime of the chamber and the PPM.