Micromechanical gratings for visible and near-infrared spectroscopy
Micromechanical gratings for visible and near-infrared spectroscopy
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用于可见光和近红外光谱的微机械光栅
DOI：
10.1109/jstqe.2004.828491
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发表时间：
2004
影响因子：
4.9
通讯作者：
A. Sudb
中科院分区：
文献类型：
--
作者：
H. Sagberg;M. Lacolle;I. Johansen;O. Lvhaugen;R. Belikov;O. Solgaard;A. Sudb
我们提出了一种微机械光栅阵列，作为一个可配置的光学滤波器的低成本和紧凑的可见光和近红外光谱传感器。我们展示了如何光栅阵列可以被用作快速扫描单色器或作为衍射滤波器，并且预期的信噪比对于两种测量模式是近似相等的。滤波器的自由光谱范围可以与定义的光谱测量区域相匹配，因此我们可以优化光谱分辨率和机电复杂性之间的关系。我们数值研究了衍射效率和滤波器形状的误差。最后，我们制作了一个小的可配置的光栅阵列和目前的测量结果，证明静电滤波器调制。
We present a micromechanical grating array that acts as a configurable optical filter for low-cost and compact visible and near-infrared spectrometric sensors. We show how the grating array can be used either as a fast scanning monochromator or as a diffractive filter, and that the expected signal-to-noise ratio is approximately equal for the two modes of measurement. The free spectral range of the filter can be matched to a defined spectral measurement region, so that we can optimize the relationship between spectral resolution and electromechanical complexity. We have numerically studied diffraction efficiency and errors in filter shape. Finally, we fabricated a small configurable grating array and present measurement results that demonstrate electrostatic filter modulation.