Comparison of Langmuir probe and laser Thomson scattering for plasma density and electron temperature measurements in HiPIMS plasma
Comparison of Langmuir probe and laser Thomson scattering for plasma density and electron temperature measurements in HiPIMS plasma
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DOI：
10.1063/1.5094602
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发表时间：
2019-04
影响因子：
2.2
通讯作者：
P. Ryan;J. Bradley;M. Bowden
中科院分区：
文献类型：
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作者：
P. Ryan;J. Bradley;M. Bowden
利用朗缪尔探针和激光汤姆逊散射技术测量了高功率脉冲磁控溅射放电中等离子体密度和电子温度随时间的演化。在等离子体内部的两个位置（非同时测量）进行了测量，分别在放电轴上的低磁场强度区域和磁阱的高磁场强度区域，对应的峰值功率密度分别为450瓦/平方厘米和900瓦/平方厘米。在脉冲导通时间内，最大等离子体密度和温度分别为6.9×10¹⁹立方米⁻³和3.7电子伏特，在余辉阶段直至250微秒时，这些值衰减到4.5×10¹⁷立方米⁻³和0.1电子伏特。结果表明，尽管朗缪尔探针具有侵入性，但它能够很好地指示放电中不同电子磁化区域的电子特性。
利用朗缪尔探针和激光汤姆逊散射技术测量了高功率脉冲磁控溅射放电中等离子体密度和电子温度随时间的演化。在等离子体内部的两个位置（非同时测量）进行了测量，分别在放电轴上的低磁场强度区域和磁阱的高磁场强度区域，对应的峰值功率密度分别为450瓦/平方厘米和900瓦/平方厘米。在脉冲导通时间内，最大等离子体密度和温度分别为6.9×10¹⁹立方米⁻³和3.7电子伏特，在余辉阶段直至250微秒时，这些值衰减到4.5×10¹⁷立方米⁻³和0.1电子伏特。结果表明，尽管朗缪尔探针具有侵入性，但它能够很好地指示放电中不同电子磁化区域的电子特性。
The temporal evolution of plasma density and electron temperature in high power impulse magnetron sputtering discharges has been measured using the Langmuir probe and laser Thomson scattering techniques. Measurements were performed (nonsimultaneously) at two positions within the plasma, in the low magnetic field strength region on the discharge axis and in the high magnetic field strength region of the magnetic trap, for peak power densities of 450 W cm–2 and 900 W cm−2, respectively. The maximum plasma densities and temperatures were 6.9 × 1019 m−3 and 3.7 eV in the pulse-on time, and values decayed to 4.5 × 1017 m−3 and 0.1 eV at times up to 250 μs into the afterglow. The results indicate that although intrusive, the Langmuir probe can provide a good indication of electron properties in regions of different electron magnetization in the discharge.The temporal evolution of plasma density and electron temperature in high power impulse magnetron sputtering discharges has been measured using the Langmuir probe and laser Thomson scattering techniques. Measurements were performed (nonsimultaneously) at two positions within the plasma, in the low magnetic field strength region on the discharge axis and in the high magnetic field strength region of the magnetic trap, for peak power densities of 450 W cm–2 and 900 W cm−2, respectively. The maximum plasma densities and temperatures were 6.9 × 1019 m−3 and 3.7 eV in the pulse-on time, and values decayed to 4.5 × 1017 m−3 and 0.1 eV at times up to 250 μs into the afterglow. The results indicate that although intrusive, the Langmuir probe can provide a good indication of electron properties in regions of different electron magnetization in the discharge.