Characterization of Nitrogen-Doped TiO2 Films Prepared by Arc Ion Plating without Substrate Heating in Various N2/O2 Gas Mixture Ratios
Characterization of Nitrogen-Doped TiO2 Films Prepared by Arc Ion Plating without Substrate Heating in Various N2/O2 Gas Mixture Ratios
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DOI：
10.3390/coatings13030654
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发表时间：
2023-03
期刊：
影响因子：
3.4
通讯作者：
Hsing-Yu Wu;Wenkui Huang;J. Wang;Guoyu Yu;Yung-Shin Sun;J. Hsu
中科院分区：
文献类型：
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作者：
Hsing-Yu Wu;Wenkui Huang;J. Wang;Guoyu Yu;Yung-Shin Sun;J. Hsu
氮掺杂的TiO 2薄膜在可见光（维斯）区具有良好的光催化性能。本研究报告了这些薄膜的制造使用电弧离子镀（AIP）在不同比例的氮分压（PN 2），氧分压（PO 2）没有基板加热和/或施加偏压。该方法允许显著拓宽待使用的可能基底的范围。X射线衍射（XRD）分析表明，室温下沉积的薄膜为非晶态，表面电子显微镜（SEM）和原子力显微镜（AFM）分析表明薄膜表面粗糙。用光谱仪和椭偏仪分别测量了它们的透过率和光学性质。此外，从Tauc-Lorentz（TL）模型，这些非晶薄膜的带隙能量推导出的椭圆偏振仪。结果表明，当PN_2/PO_2为1/4时，N掺杂的TiO_2薄膜的禁带宽度最窄，在可见光区的吸收率最高。这可以归因于在样品的Ti和N的X射线光电子能谱（XPS）中观察到的突出的Ti-N峰。此外，通过亚甲基蓝（MB）测试验证，该样品具有最佳的光催化性能，其最大的能隙。
Nitrogen-doped TiO2 films exhibit good photocatalytic ability in the visible (VIS) light region. This study reports the fabrication of these films using arc ion plating (AIP) in different ratios of nitrogen partial pressure (PN2) to oxygen partial pressure (PO2) without substrate heating and/or applied bias. This approach allows a significant broadening of the range of possible substrates to be used. X-ray diffraction (XRD) patterns indicate that these films deposited at room temperature are amorphous, and surface electron microscope (SEM) and atomic force microscope (AFM) images show that they have rough surfaces. Their transmittance and optical properties are measured with a spectrometer and ellipsometer, respectively. In addition, the bandgap energies of these amorphous films are derived by the ellipsometer from the Tauc–Lorentz (TL) model. The results indicate that the N-doped TiO2 film with a PN2/PO2 ratio of 1/4 attains the narrowest bandgap and the highest absorbance in the visible region. It can be attributed to the prominent Ti–N peaks observed in the sample’s Ti and N X-ray photoelectron spectroscopy (XPS) spectra. In addition, verified with the methylene blue (MB) test, this sample exhibits the best photocatalytic performance for its narrowest energy gap.