Synthesis and characterization of carbon nanoparticle films prepared by plasma-based ion implantation
Synthesis and characterization of carbon nanoparticle films prepared by plasma-based ion implantation
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等离子体离子注入制备碳纳米粒子薄膜的合成与表征
DOI：
10.1002/sia.5457
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发表时间：
2014
影响因子：
1.7
通讯作者：
Masahiro Kawaguchi
中科院分区：
文献类型：
--
作者：
Shu Sawai;Yuya Nakahara;Naohiro Matsumoto;Junho Choi;Takahisa Kato;Masahiro Kawaguchi
通过等离子体离子注入方法合成了碳纳米颗粒（CNP），并研究了CNP的结构变化和合成机理。 CNP 是通过将甲烷气体中的碳离子注入银薄膜中来生长的。为了从银基质中获得纯 CNP，在高真空下通过热处理蒸发银膜。 XPS深度分析表明，最初银原子在植入过程中优选溅射，然后CNP逐渐开始出现在银上，碳原子集中在表面附近。表面堆积的碳可以防止银膜溅射和碳离子渗入银基体。 CNPs生长至20纳米，但植入2小时后其尺寸没有增加。相反，在植入 3 小时后观察到 CNP 之间的膜簇。在 750°C 下去除银以获得 CNP 的热处理不会影响 CNP 的生长。拉曼光谱表明球形CNPs由石墨结构组成，长时间注入会产生非晶态膜以及CNPs。版权所有 © 2014 约翰·威利父子有限公司
Carbon nanoparticles (CNPs) were synthesized by the plasma‐based ion implantation method, and structural variations and the synthesis mechanism of CNPs were investigated. CNPs were grown by implanting carbon ions from methane gas into thin silver films. To obtain pure CNPs from the silver matrix, the silver films were evaporated by a thermal process under high vacuum. XPS depth analysis revealed that initially silver atoms were preferably sputtered during implantation, then CNPs gradually started to appear on the silver and carbon atoms concentrated near the surface. Stacked carbons on the surface may prevent silver films from being sputtered and carbon ions from penetrating into the silver matrix. The CNPs grew up to 20 nm, but their size did not increase after the implantation for 2 h. Instead, a membrane cluster among the CNPs was observed after the implantation for 3 h. Thermal process at 750 °C for removing silver to obtain only CNPs did not affect CNP growth. Raman spectra indicated that spherical CNPs consist of graphitic structure and long‐time implantation yielded amorphous membranes as well as the CNPs. Copyright © 2014 John Wiley & Sons, Ltd.