Temperature dependence of mobility in E-beam irradiated PMMA
Temperature dependence of mobility in E-beam irradiated PMMA
复制标题
电子束辐照 PMMA 中迁移率的温度依赖性
DOI:
10.1109/ceidp.1998.732974
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发表时间:
1998
期刊:
影响因子:
--
通讯作者:
Y. Tanaka
中科院分区:
文献类型:
--
作者:
M. Kodaka;S. Ueda;T. Takada;Y. Tanaka
The mobility of electrons in electron beam (e-beam) irradiated PMMA at various temperature was calculated from simultaneous measurement results of thermally stimulated current (TSC) and space charge distribution. In former paper, it is shown that the real conduction current is obtained by the simultaneous measurement of TSC and space charge distribution. To measure the precise TSC and space charge distribution simultaneously, a new computer control system has been developed using pulsed electron acoustic (PEA) method. In this paper, the mobility in e-beam irradiated PMMA is estimated from the results of the conduction current which is obtained using the new system. From these results, it is found that the electron mobility increases with increasing temperature.