Integral diffraction efficiency model for multilayer diffractive optical elements with wide angles of incidence in case of polychromatic light.
Integral diffraction efficiency model for multilayer diffractive optical elements with wide angles of incidence in case of polychromatic light.
复制标题
DOI：
10.1364/oe.27.021497
复制
发表时间：
2019-07
期刊：
影响因子：
3.8
通讯作者：
S. Mao;Lidong Zhao;Jianlin Zhao
中科院分区：
文献类型：
--
作者：
S. Mao;Lidong Zhao;Jianlin Zhao
斜入射是衍射光学元件的常用工作模式。多层衍射光学元件的衍射效率对入射角非常敏感。因此，宽入射角MLDOE的设计和衍射效率分析具有普遍意义和实用价值。本文提出了一种适用于宽入射角多波长非线性光学元件的积分衍射效率模型，并详细描述了相应的优化设计。结果表明，通过表面微结构高度优化可以实现高衍射效率，从而保证混合光学系统中宽入射角MLDOE的高调制传递函数（MTF）。在此基础上，给出了以PMMA和POLYCARB组合光学塑料为双层基片的可见波段MLDOE的优化设计过程和模拟计算。结果表明，采用该优化设计方案，可以实现最大衍射效率和最小微结构高度，使得MLDOE设计在整个波段和宽入射角范围内都能实现，尤其适用于变焦混合光学系统。
Oblique incidence is the normal working mode for diffractive optical elements (DOEs). The diffraction efficiency is very sensitive to the angle of incidence for multilayer diffractive optical elements (MLDOEs). Therefore, the design and diffraction efficiency analysis of MLDOEs with wide angles of incidence is of universal significance and practice. We propose an integral diffraction efficiency model for MLDOEs with wide angles of incidence in case of polychromatic light and then describe this corresponding optimal design in detail. It is shown that high diffraction efficiency can be realized by the surface micro-structure heights optimization, ensuring high modulation transfer function (MTF) for MLDOEs with wide angles of incidence in hybrid optical systems. On this basis, we present the optimal design process and simulation of an MLDOE working in visible waveband with optical plastic materials combination PMMA and POLYCARB as the two-layer substrates. The result shows that with this optimal design, we can achieve the maximum diffraction efficiency and minimum micro-structure heights, which makes the MLDOE design exactly over the entire waveband and wide angles of incidence especially for zoom hybrid optical system.