A.Saeki, T.Kozawa, Y.Yoshida, S.Tagawa: "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process(II)"Japanese Journal of Applied Physics. 41. 4213-4216 (2002)
A.Saeki, T.Kozawa, Y.Yoshida, S.Tagawa: "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process(II)"Japanese Journal of Applied Physics. 41. 4213-4216 (2002)
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A.Saeki、T.Kozawa、Y.Yoshida、S.Takawa:“微观区域辐射诱导反应的研究,以基本理解光刻过程中电子束图案化(II)”日本应用物理学杂志。
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