Parylene-C diaphragm-based low-frequency photoacoustic sensor for space-limited trace gas detection
Parylene-C diaphragm-based low-frequency photoacoustic sensor for space-limited trace gas detection
复制标题
基于聚对二甲苯-C 隔膜的低频光声传感器，用于空间有限的痕量气体检测
DOI：
10.1016/j.optlaseng.2020.106288
复制
发表时间：
2020-11-01
影响因子：
4.6
通讯作者：
Yu, Qingxu
中科院分区：
文献类型：
--
作者：
Gong, Zhenfeng;Chen, Yewei;Yu, Qingxu
提出了一种基于Parylene-C膜的低频光声传感器，用于空间受限的痕量气体检测。传感器头的整体结构包括圆柱形黄铜外壳、Parylene-C膜片和PA腔，PA腔也被认为是法布里-珀罗（F-P）腔。PA腔的体积仅为74 μ L。一个分布反馈（DFB）激光器被用作声激励源。采用光纤白光干涉（WLI）方法测量Parylene-C膜片的偏转，以获得PA压力信号。PA传感器用于乙炔（C2 H2）检测，当锁定积分时间为1 s时，检测限为88.4 ppb。
A low-frequency photoacoustic (PA) sensor based on Parylene-C diaphragm for space-limited trace gas detection is presented. The overall structure of the sensor head includes a cylindrical brass shell, a Parylene-C diaphragm, and a PA cavity regarded as the Fabry-Perot (F-P) cavity as well. The volume of the PA cavity is only 74 mu L. A distributed feedback (DFB) laser is used as an acoustic excitation source. The deflection of the Parylene-C diaphragm was measured by using fiber-optic white-light interference (WLI) method to obtain the PA pressure signal. The PA sensor is used for acetylene (C2H2) detection with a detection limit of 88.4 parts-per-billion (ppb) when the lock-in integration time is 1 s.