Fabrication of Superconducting Nanowires Using MgB2 Thin Films
Fabrication of Superconducting Nanowires Using MgB2 Thin Films
复制标题
使用 MgB2 薄膜制造超导纳米线
DOI：
10.1109/tasc.2012.2231455
复制
发表时间：
2013
影响因子：
1.8
通讯作者：
and Z. Wang
中科院分区：
文献类型：
--
作者：
H. Shimakage;and Z. Wang
在本文中，我们报告的MgB 2超导薄膜，这将是有用的热电子测辐射热计混频器和超导单光子探测器的制备和表征。采用旋转式溅射系统制备了MgB 2薄膜，薄膜厚度为6 nm，临界温度为7 K.我们成功地制作了热电子探测器，在4.2 K下，在400 nm的桥中，MgB 2厚度为30 nm，电流密度为7.7 × 106 A/cm 2。此外，我们成功地制作了250 nm宽，10 nm厚，临界温度为12 K的曲折线探测器。这些结果表明，这些设备的制造过程是一个有前途的技术，为未来的实验。
In this paper, we report on the fabrication and characterization of MgB2ultrathin films, which would be useful for hot electron bolometer mixers and superconducting single photon detectors. MgB2thin films were fabricated using a carousel sputtering system in which 6-nm-thick MgB2thin films showed a critical temperature of 7 K. We succeeded in fabricating hot electron detectors; these showed a high current density of 7.7 × 106A/cm2at 4.2 K in the 400-nm bridge with an MgB2thickness of 30 nm. Furthermore, we succeeded in fabricating detectors with a 250-nm-wide meander line, 10 nm thickness, and critical temperature of 12 K. These results indicate that the fabrication process for these devices is a promising technique for future experiments.