Effects of thickness and atmospheric annealing on structural, electrical and optical properties of GZO thin films by spray pyrolysis
Effects of thickness and atmospheric annealing on structural, electrical and optical properties of GZO thin films by spray pyrolysis
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DOI：
10.1016/j.jallcom.2012.05.128
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发表时间：
2012-11
影响因子：
6.2
通讯作者：
T. Rao;M. Kumar;N. Hussain
中科院分区：
文献类型：
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作者：
T. Rao;M. Kumar;N. Hussain
采用喷雾热分解（SP）技术在玻璃衬底上制备了掺镓氧化锌（GZO）薄膜。研究了GZO薄膜的厚度以及在空气和氧气中退火对薄膜结构、电学和光学性能的影响。沉积膜被发现多晶与六方结构，显示沿c轴沿着的压应力。发现压应力随厚度和在空气或氧气中退火而降低。在氧气中进行热处理后获得了最佳特性，其中实现了最高的载流子浓度，并且随着厚度的增加，可见光透射率为85-70%，电阻率为4.21-2.25×10−3 μ cm。氧气退火样品的带隙被发现具有较低的值相比，空气退火和沉积样品。薄膜厚度和退火气氛的带隙依赖性与收缩效应有关。光致发光（PL）研究证实，GZO薄膜的宽可见光发射是由于本征陷阱和深能级空位的共同作用。
Gallium doped zinc oxide (GZO) films have been prepared on glass substrates by the spray pyrolysis (SP) technique. The effects of thickness and annealing in air and oxygen on structural, electrical and optical properties of GZO thin films were investigated. As-deposited films were found polycrystalline with hexagonal structure that showed compressive stress along the c-axis. The compressive stress was found to decrease by thickness and by annealing in air or oxygen. The best characteristics have been obtained after heat treatment in oxygen, where the highest carrier concentrations have been achieved and with visible transmittance of 85–70% and resistivity of 4.21–2.25×10−3Ωcm with increasing thickness. The band gaps of oxygen annealed samples are found to have low values in comparison to air annealed and as deposited samples. The band gap dependence on the film thickness and annealing atmosphere is correlated to the shrinkage effect. Photoluminescence (PL) study was confirmed that broad visible emission in GZO films due to both the intrinsic traps and deep level vacancies.