Micromachining for terahertz applications
Micromachining for terahertz applications
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DOI：
10.1109/22.734493
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发表时间：
1998-11
影响因子：
4.3
通讯作者：
V. Lubecke;K. Mizuno;Gabriel M. Rebeiz
中科院分区：
文献类型：
--
作者：
V. Lubecke;K. Mizuno;Gabriel M. Rebeiz
综述了太赫兹频段微机械天线、传输线、波导结构和平面可动元件的研究进展。微机械加工提供了一种低成本的替代传统的（和非常昂贵的）加工波导技术，导致天线具有良好的辐射模式，低损耗调谐器，和三维（3-D）微机械结构适合太赫兹应用。各种微机械波导和平面结构的制造过程中描述这里，沿着与测量的太赫兹性能。微加工技术在太赫兹系统中的应用包括需要大量元件的焦平面成像阵列和用于污染监测等商业和工业应用的低成本接收器。
An overview of recent progress in the research and development of micromachined antennas, transmission lines, waveguides structures, and planar movable components for terahertz frequencies is presented. Micromachining is shown to provide a low-cost alternative to conventional (and very expensive) machined-waveguide technology, resulting in antennas with excellent radiation patterns, low-loss tuners, and three-dimensional (3-D) micromachined structures suitable for terahertz applications. Fabrication procedures for a variety of micromachined waveguide and planar structures are described here, along with measured terahertz performance. Applications of micromachining techniques for terahertz systems include focal-plane imaging arrays requiring a large number of elements and low-cost receivers for commercial and industrial applications such as pollution monitoring.