Experimental verification of models for microfabricated piezoelectric vibration energy harvesters
Experimental verification of models for microfabricated piezoelectric vibration energy harvesters
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DOI：
10.2514/1.25047
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发表时间：
2007-05-01
期刊：
影响因子：
2.5
通讯作者：
Wardle, Brian L.
中科院分区：
文献类型：
--
作者：
duToit, Noel E.;Wardle, Brian L.
对微电子机械系统中的压电式振动收割机的功率优化模型进行了实验验证。这样的收割机可以为各种传感器提供动力，最近有专门从事收获的国家研讨会。提供了详细的实验结果，包括位移历史和电输出，在一定的频率和电载荷范围内与(优化的)模态模型进行了比较。所考虑的收割机几何形状是对称的双压片大尺度悬臂梁。尽管悬臂双晶片收割机的一些实验工作已经发表，但模型验证所需的关键测试和/或设备参数缺失和/或在功率最优(最有趣的工作点)及其附近的数据没有提供。因此，使用功率优化的建模结果来指导测试矩阵，进行了详细的实验。在测试的广泛参数范围内，这些模型准确地预测了设备共振(共振和反共振频率)以外的所有趋势和设备性能。在共振频率附近，模型始终低估了电性能，这被满意地归因于(并得到实验支持)在大应变区的众所周知的压电耦合非线性。这里提供的数据可以作为基准数据来验证其他建模工作。经过验证的模型已用于商用飞机的微电子机械系统收割机的优化设计，微制造正在进行中。
Experiments have been performed to verify power-optimized modal models of piezoelectric vibration harvesters for microelectromechanical systems. Such harvesters can power a variety of sensors, and there have been recent national workshops dedicated to harvesting. Detailed experimental results, including displacement histories and electrical output, are provided over a range of frequencies and electrical loadings to compare with (optimized) modal models. The harvester geometry considered is that of a symmetric bimorph macroscale cantilever. Although some experimental work for cantilevered bimorph harvesters has been published, key testing and/or device parameters needed for model verification are missing and/or data at and near power optima (the most interesting operating points) are not provided. Therefore, a detailed set of experiments was performed using power-optimized modeling results to guide the test matrix. Over the broad range of parameters tested, the models accurately predicted all trends and device performance away from device resonances (resonance and antiresonance frequencies). Near the resonance frequencies, the model consistently underpredicts electrical performance, which is satisfactorily attributed (and experimentally supported) to the well-known piezoelectric coupling nonlinearity in the large-strain region. The data presented herein can serve as benchmark data to verify other modeling efforts. The verified models have been used to optimally design microelectromechanical system harvesters for commercial aircraft and microfabrication is ongoing.