Characteristics of rf-produced, high-density plasma with very small diameter
Characteristics of rf-produced, high-density plasma with very small diameter
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DOI:
10.7566/jpscp.1.015022
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发表时间:
2014-03
期刊:
影响因子:
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通讯作者:
T. Nakagawa;S. Shinohara;D. Kuwahara;A. Mishio;H. Fujitsuka
中科院分区:
文献类型:
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作者:
T. Nakagawa;S. Shinohara;D. Kuwahara;A. Mishio;H. Fujitsuka
To investigate characteristics of helicon plasma with a very small diameter, we have developed the Small Helicon Device (SHD) and measured the electron density under various conditions over a wide range of radio frequencies. Using a tube with inner diameter of 20 mm, an electron density ne of ~ 10 13 cm near the antenna region was obtained with an excitation frequency f of 7 MHz, rf power Prf of ~ 1000 W, and axial magnetic field in the magnet coil region B of 560 G. In the case of an inner diameter of 5 (10) mm under conditions of f = 12 (7) MHz, Prf ~ 1000 W, and B = 280 G, ne of ~ 10 11 cm was succesfully achieved even away from the antenna region.