Fabrication of Superplastic Microtubes Using Dieless Drawing Process
Fabrication of Superplastic Microtubes Using Dieless Drawing Process
复制标题
采用无模拉拔工艺制造超塑性微管
DOI：
10.2320/matertrans.p-mra2008810
复制
发表时间：
2008
期刊：
影响因子：
--
通讯作者：
T. Sakai
中科院分区：
文献类型：
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作者：
T. Furushima;K. Manabe;T. Sakai
在微系统技术（MST）和微机电系统（MEMS）中，微管被广泛使用和需要，特别是作为微型元件。本文对超塑性无模拔制微细管的工艺进行了实验研究。超塑性材料为外径为2 mm、壁厚为0.5mm的Al-78 Zn合金管材，采用带空冷喷嘴的高频感应加热装置进行无模拉拔。在单道次无模拉伸实验中，研究了成形温度、加热器与冷却器之间的距离、拉伸速度等拉伸条件对变形形貌的影响。在三道次无模拉伸中，成功地制备出外径为343 mm、内径为161 mm的微型管。此外，从实验结果和基本原理出发，证实了无模拉伸时，内外径比保持恒定。换句话说，在这个过程中，满足的几何相似性的最小尺寸。最后，发现在无模拉伸过程中，微管的表面粗糙度保持一个恒定值。[doi：10.2320/材料trans. P-MRA 2008810]
Microtube is commonly used and required, particularly as micro components in micro-system technologies (MST) and micro electromechanical systems (MEMS). In this paper, fabrication process of microtube using superplastic dieless tube drawing was studied experimentally. Superplastic material used is Al-78Zn alloy tube with outer diameter of 2 mm and wall thickness of 0.5 mm. A high-frequency induction heating apparatus with air cooling nozzle was used for the dieless drawing. In the experiment of single pass dieless drawing, the effect of drawing conditions such as forming temperature, distance between heater and cooler and tensile speed on deformation profile, was clarified. Furthermore, in three-pass dieless drawing, a microtube with outer and inner diameters of 343 mm and 161 mm respectively can be fabricated successfully. In addition, from the experimental results and fundamental principles, it is confirmed that the ratio of inner to outer tube diameters maintains a constant value during dieless drawing. In other words, the geometrical similarity with the minimization of dimension is satisfied in this process. Finally, it is found that the surface roughness of microtube maintains a constant value in the dieless drawing process. [doi:10.2320/matertrans.P-MRA2008810]