Dynamic response of a tunable MEMS accelerometer based on repulsive force
Dynamic response of a tunable MEMS accelerometer based on repulsive force
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DOI：
10.1016/j.sna.2019.02.007
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发表时间：
2019-04-15
影响因子：
4.6
通讯作者：
Miles, Ronald
中科院分区：
文献类型：
--
作者：
Daeichin, Meysam;Ozdogan, Mehmet;Miles, Ronald
本文描述了一种可调谐的MEMS静电加速度计，它使用排斥电极结构，使设计不受电容拉入不稳定性的阻碍。排斥力的配置使直流偏置电压的增加，而不会遭受拉入失效模式。这种增加电压的灵活性可以用作调谐参数，以扩大工作频率范围并提高加速度计的鲁棒性。建立了集总参数模型，模拟了静电和动态机械载荷联合作用下微结构的响应。静电力用有限元模拟估计。采用射击法和长时间积分法分别求解了谐波基激励和半正弦冲击载荷的非线性运动方程。为了验证该模型，制作了一个传感器，并在谐波基激励和机械冲击下进行了表征。当偏置电压为40 V时，机械灵敏度为0.1 μ m/g。实验数据与仿真结果吻合较好。本研究中提出的综合动力学特性有助于开发具有谐波和冲击加速度可调能力的功能加速度计。(C) 2019 Elsevier B.V.版权所有
This paper describes a tunable MEMS electrostatic accelerometer that uses a repulsive electrode configuration so that the design is not hampered by capacitive pull-in instability. The repulsive force configuration enables the increase of DC bias voltage without suffering from the pull-in failure mode. This flexibility in increasing voltage can be employed as a tuning parameter to widen the working frequency range and to improve the robustness of the accelerometer. A lumped parameter model is developed to simulate the response of the microstructure under a combination of electrostatic and dynamic mechanical loading. The electrostatic force is estimated using a finite element simulation. The nonlinear equations of motion are solved for harmonic base excitations and half-sine shock loads using the shooting and the long-time integration methods, respectively. To validate the model, a sensor is fabricated and characterized under harmonic base excitation and mechanical shocks. A mechanical sensitivity of 0.1 mu m/g is achieved when the bias voltage is 40 V. The experimental data are in good agreement with the simulation results. The comprehensive dynamical characterization presented in this study contributes to the development of functional accelerometers with tunable capabilities to harmonic and shock accelerations. (C) 2019 Elsevier B.V. All rights reserved.